PREPARATION AND CHARACTERIZATION OF TiO2 THIN FILMS FOR UV SENSOR

Abstract

Nanosized TiO2 thin films were deposited by conventional vacuum thermal evaporation and triode-cathode sputtering of Ti on silicon and quartz substrates. To form TiO2 a high temperature annealing of the Ti films was carried out in the range of 450÷800 ºC. The optical properties of TiO2 were studied by measuring UV-VIS transmittance spectra and the indirect band gap was evaluated. Scanning electron microscope (SEM), atomic force microscope (AFM) and energy-dispersive spectroscopy were employed for surface and structure analysis. Structures for UV sensors were formed by thermal evaporation of various combing contacts on the TiO2/Si substrates. The photoresponse of the structures was detected in the wavelength range of 235÷420 nm. An increase in photocurrent with an order of magnitude was detected by exposing samples to UVA illumination and applying 6÷10 V bias voltage. The obtained results indicated that the studied structures are suitable for UV sensors.

Recommended articles

IMPACT RESISTANCE OF LATTICE STRUCTURE MADE BY SELECTIVE LASER MELTING FROM AlSi12 ALLOY

RADEK VRANA1, DANIEL KOUTNY1, DAVID PALOUSEK1, TOMAS ZIKMUND2
Keywords: AlSi12 | energy | particle distribution | impact resistance | lattice structure | selective laser melting

CONTRIBUTION TO DIAGNOSTICS OF ASYNCHRONOUS MOTORS

VLADIMIR VESELKOV, MAXYM ZHALO, ANDREI TURYGIN, MILOS HAMMER, ROBERT JANKOVYCH
Keywords: angular misalignment | fuzzy subsystem | fuzzy expert system | expert system | electric drive | asynchronous motor | diagnostics

STUDY OF SUSPENSION CHARACTERISTICS BY USING FLEXIBLE SUBFRAME

TOMAS VRANA1, JAN KOVANDA2, JOSEF BRADAC3
Keywords: hyperworks | toe angle | camber angle | subframe flexible model | MBS model | single-axle suspension

A DESCRIPTION OF METHODS AND TECHNIQUES OF SAFETY CULTURE RESEARCH

IRINA FEDORYCHEVA, MILOS HAMMER
Keywords: questionnaire | ethnographic research | sociometry | Delphi method | safety culture