ACCURACY OF MEASUREMENT IN NANOMETROLOGY

Abstract

The presented article focuses on measurements of extremely small dimensions in nanometrology using tactile probes. It addresses a newly developed method of precise measurements in nanometrology by touch probes, where the measurements are carried out on the machine SIOS NMM-1. The aim of this work is to determine accuracy of measurements on this machine. The main contribution of this work is a creation of a methodology for the measurement of precision parts and determination of accuracy of measurement when using this device in nanometrology. The work also includes methodology for the calculation of measurement uncertainty, a keystone in determining the accuracy of measurement in nanometrology. The article provides results of representative sets of measurements of ruby ball diameters, including the evaluation of statistical parameters and determination of the combined measurement uncertainty.

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