ACCURACY OF MEASUREMENT IN NANOMETROLOGY

Abstract

The presented article focuses on measurements of extremely small dimensions in nanometrology using tactile probes. It addresses a newly developed method of precise measurements in nanometrology by touch probes, where the measurements are carried out on the machine SIOS NMM-1. The aim of this work is to determine accuracy of measurements on this machine. The main contribution of this work is a creation of a methodology for the measurement of precision parts and determination of accuracy of measurement when using this device in nanometrology. The work also includes methodology for the calculation of measurement uncertainty, a keystone in determining the accuracy of measurement in nanometrology. The article provides results of representative sets of measurements of ruby ball diameters, including the evaluation of statistical parameters and determination of the combined measurement uncertainty.

Recommended articles

INFLUENCE OF HIGH ENERGY TREATMENT ON WEAR OF EDGES KNIVES OF WOOD-CUTTING TOOL

VADZIM CHAYEUSKI, VALERY ZHYLINSKI, ALEXANDER GRISHKEVICH, PAVEL RUDAK, STEFAN BARCIK
Keywords: coating | milling tool | knives | blade | wear

QUANTITIES AND SENSORS FOR MACHINE TOOL SPINDLE CONDITION MONITORING

LUDEK JANAK, JAKUB STETINA, ZDENEK FIALA, ZDENEK HADAS
Keywords: machine tool diagnostics | condition based maintenance | sensor fusion | industry 4.0 | HUMS | FMEA | TCM

OCCURRENCE OF GLOBULE OF DEBRIS ON SURFACES MACHINED BY WEDM

KATERINA MOURALOVA, RADIM ZAHRADNICEK, RADIM HRDY
Keywords: WEDM | electrical discharge machining | titanium alloy Ti-6Al-4V | iron-rhodium alloy | globule of debris

CHEMICAL RESISTANCE OF MATERIALS USED IN ADDITIVE MANUFACTURING

JIRI SAFKA, MICHAL ACKERMANN, DAVID MARTIS
Keywords: fused deposition modelling | polyJet matrix | polymers | tensile test